.Hydrogen passivation for the performance enhancement of poly-Si crystallized by double-frequency YAG laser[J].Optoelectronics Letters,2010,6(4):288-290 Hydrogen passivation for the performance enhancement of poly-Si crystallized by double-frequency YAG laser 李娟 Tianjin Key Laboratory of Photo-electronic Thin Film Devices and Technology； Key Laboratory of Opto-electronic Information Science and Technology(Nankai University and Tianjin University) ,Ministry of Education； Institute of Photo-electronics,Nankai University； Abstract:       The hydrogen passivation is adopted to enhance the performance of poly-Si crystallized by YAG laser annealing (LA poly-Si). The effects of passivation time, passivation power and passivation temperature on the hall mobility of the LA poly-Si are investigated and the mechanism of the hydrogen passivation is preliminarily analyzed. It is found that the effect of the hydrogen passivation on the qulity of YAG laser annealed poly-Si is also correlated with the deposition method and the defect type in it. Hits: 3828 Download times: 282 View Full Text    Download reader