Zhang Geng-yu,Yang Bao-he,Zhao Jian,Li Cui-ping,Li Ming-ji.Impact of cooling condition on the crystal structure and surface quality of preferred c-axis-oriented AlN films for SAW devices[J].Optoelectronics Letters,2011,7(4):273-276 Impact of cooling condition on the crystal structure and surface quality of preferred c-axis-oriented AlN films for SAW devices Author Name Affiliation Zhang Geng-yu  Tianjin Key Laboratory of Film Electronic and Communication Devices,Tianjin University of Technology；  Yang Bao-he  Tianjin Key Laboratory of Film Electronic and Communication Devices,Tianjin University of Technology；  Zhao Jian  Tianjin Key Laboratory of Film Electronic and Communication Devices,Tianjin University of Technology；  Li Cui-ping  Tianjin Key Laboratory of Film Electronic and Communication Devices,Tianjin University of Technology；  Li Ming-ji  Tianjin Key Laboratory of Film Electronic and Communication Devices,Tianjin University of Technology；  Abstract:       AlN films with preferred c-axis orientation are deposited on Si substrates using the radio frequency(RF) magnetron sputtering method.The post-processing is carried out under the cooling conditions including high vacuum,low vacuum under deposition gas ambient and low vacuum under dynamic N2 ambient.Structures and morphologies of the films are analyzed by X-ray diffraction(XRD) and atomic force microscopy(AFM).The hardness and Young’s modulus are investigated by the nanoindenter.The experimental r... Hits: 3992 Download times: 211 View Full Text    Download reader