| Shuang-yue Hou,Ying Xiong,Shan Chen,Peng-hui Xiong,Xiang-yu Chen,Xiao-bo Zhang,Yang-chao Tian,Gang Liu.Fabrication of high aspect ratio gratings for X-ray imaging[J].Optoelectronics Letters,2014,10(2):88-90 |
| Fabrication of high aspect ratio gratings for X-ray imaging |
| Author Name | Affiliation | E-mail | | Shuang-yue Hou | National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei, 230029, China | | | Ying Xiong | National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei, 230029, China | | | Shan Chen | National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei, 230029, China | | | Peng-hui Xiong | National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei, 230029, China
Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, Hefei, 230026, China | | | Xiang-yu Chen | Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, Hefei, 230026, China | | | Xiao-bo Zhang | National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei, 230029, China | | | Yang-chao Tian | National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei, 230029, China | | | Gang Liu | National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei, 230029, China | liugang@ustc.edu.cn |
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| Abstract: |
| Grating-based X-ray imaging system is an important tool to investigate the inner structure of thick samples. The key components of the system consist of three golden gratings. The high aspect ratio gratings are fabricated using the SU-8 material. Considering the grating linewidth broadening varies with exposure dose, the relationship between linewidth broadening and exposure dose is studied experimentally. A series of gratings with different periods and different duty cycles are designed by optimizing the linewidth and exposure dose. Finally, the gratings are successfully fabricated by combining UV lithography and electroplating. |
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| This work has been supported by the Major State Basic Research Development Program of China （No.2012CB825804）. |
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