| GUO Hui-jing,ZHANG Xiao-liang,LI Xiao-chun.Fabrication of ordered micro- and nano-scale patterns based on optical discs and nanoimprint[J].Optoelectronics Letters,2016,12(4):241-244 |
| Fabrication of ordered micro- and nano-scale patterns based on optical discs and nanoimprint |
| Author Name | Affiliation | | GUO Hui-jing | Key Laboratory of Advanced Transducers and Intelligent Control System, Ministry of Education and Shanxi Province, Colleges of Physics and Optoelectronics, Taiyuan University of Technology, Taiyuan 030024, China | | ZHANG Xiao-liang | Key Laboratory of Advanced Transducers and Intelligent Control System, Ministry of Education and Shanxi Province, Colleges of Physics and Optoelectronics, Taiyuan University of Technology, Taiyuan 030024, China | | LI Xiao-chun | Key Laboratory of Advanced Transducers and Intelligent Control System, Ministry of Education and Shanxi Province, Colleges of Physics and Optoelectronics, Taiyuan University of Technology, Taiyuan 030024, China |
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| Abstract: |
| A simple method to fabricate one-dimensional (1-D) and two-dimensional (2-D) ordered micro- and nano-scale patterns is developed based on the original masters from optical discs, using nanoimprint technology and soft stamps. Polydimethylsiloxane (PDMS) was used to replicate the negative image of the 1-D grating pattern on the masters of CD-R, DVD-R and BD-R optical discs, respectively, and then the 1-D pattern on one of the PDMS stamps was transferred to a blank polycarbonate (PC) substrate by nanoimprint. The 2-D ordered patterns were fabricated by the second imprinting using another PDMS stamp. Different 2-D periodic patterns were obtained depending on the PDMS stamps and the angle between the two times of imprints. This method may provide a way for the fabrication of complex 2-D patterns using simple 1-D masters. |
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