CHEN Jing-yi,YAN Sen,ZHENG Rui-lin,ZHANG Liao-lin,GUO Hai-tao,LIU Chun-xiao.Optical properties of an Er3+-doped phosphate glass waveguide formed by single-energy H+ ion implantation[J].Optoelectronics Letters,2019,15(2):104-107
Optical properties of an Er3+-doped phosphate glass waveguide formed by single-energy H+ ion implantation
Author NameAffiliation
CHEN Jing-yi College of Electronic and Optical Engineering, Nanjing University of Posts and Telecommunications, Nanjing 210023, China 
YAN Sen College of Electronic and Optical Engineering, Nanjing University of Posts and Telecommunications, Nanjing 210023, China 
ZHENG Rui-lin College of Electronic and Optical Engineering, Nanjing University of Posts and Telecommunications, Nanjing 210023, China 
ZHANG Liao-lin School of Material Science and Engineering, Jiangxi University of Science and Technology, Ganzhou 341000, China 
GUO Hai-tao State Key Laboratory of Transient Optics and Photonics, Xi′an Institute of Optics and Precision Mechanics, Chinese Academy of Sciences, Xi′an 710119, China 
LIU Chun-xiao College of Electronic and Optical Engineering, Nanjing University of Posts and Telecommunications, Nanjing 210023, China 
Abstract:
      In this work, we report the fabrication of an optical waveguide by single-energy H+ ion implantation in the Er3+-doped phosphate glass. The ion implantation conditions are with energy of 0.4 MeV and a fluence of 8.0×1016 ions/cm2. The dark mode spectrum of the waveguide structure was measured by the prism coupling experiment. The refractive index change along with the penetration depth was fitted by using the reflectivity calculation method (RCM). Finally, the calculated near-field light intensity distribution shows superior waveguide properties, which demonstrates its promising potentials for compact optical integrated devices.
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