ZENG Chun-hong,LIN Wen-kui,SUN Yu-hua,CUI Qi,ZHANG Xuan,LI Shao-juan,ZHANG Bao-shun,KONG Mei.Silicon carbide and graphene based UV-IR dual-color detector[J].Optoelectronics Letters,2019,15(3):170-173 |
Silicon carbide and graphene based UV-IR dual-color detector |
Author Name | Affiliation | ZENG Chun-hong | Changchun University of Science and Technology, Changchun 130022, China Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences, Suzhou 215123, China | LIN Wen-kui | Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences, Suzhou 215123, China | SUN Yu-hua | Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences, Suzhou 215123, China | CUI Qi | Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences, Suzhou 215123, China | ZHANG Xuan | Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences, Suzhou 215123, China | LI Shao-juan | Funsom & Collaborative Innovation Center of Suzhou Nano Science and Technology, Suzhou University, Suzhou 215123, China | ZHANG Bao-shun | Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences, Suzhou 215123, China | KONG Mei | Changchun University of Science and Technology, Changchun 130022, China |
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Abstract: |
An ultraviolet-infrared dual-color detector is proposed and realized based on the vertical integration of single-layer graphene and a 4H-SiC layer by semiconductor micro-fabrication technology. The spectral response characteristics of the detector are analyzed. The ultraviolet response range is 208—356 nm with a responsivity larger than 0.4 mA/W and the infrared response range is 1.016—1.17 μm with a responsivity larger than 0.4 mA/W at room temperature and 5 V bias voltage. The peak responsivity of the graphene in the ultraviolet-C band at 232 nm is 0.73 mA/W and in the near infrared band at 1.148 μm is 0.64 mA/W. The peak responsivity of SiC layer in the ultraviolet-B band at 312 nm is 2.27 mA/W. Besides, the responsivity increases with the bias voltage. |
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