WANG Jue,TAOQing,HU Chen,ZHAI Zhong-sheng,CHENG Jian,LIU Dun.Fabrication of sapphire rib waveguides using a femtosecond laser[J].Optoelectronics Letters,2019,15(3):190-194 Fabrication of sapphire rib waveguides using a femtosecond laser Author Name Affiliation WANG Jue  School of Mechanical Engineering, Hubei University of Technology, Wuhan 430068, China  TAOQing  School of Mechanical Engineering, Hubei University of Technology, Wuhan 430068, China  HU Chen  School of Mechanical Engineering, Hubei University of Technology, Wuhan 430068, China  ZHAI Zhong-sheng  School of Mechanical Engineering, Hubei University of Technology, Wuhan 430068, China  CHENG Jian  School of Mechanical Engineering, Hubei University of Technology, Wuhan 430068, China  LIU Dun  School of Mechanical Engineering, Hubei University of Technology, Wuhan 430068, China  Abstract:       We demonstrate a method for fabricating sapphire rib waveguides with femtosecond laser micromachining technology. Finite difference beam propagation method (FD-BPM) is applied to design sapphire rib waveguides. We explore the process of etching on a sapphire substrate surface via direct laser ablation. Rib waveguides that satisfies the dimensions of our design were fabricated. Actual light propagation performance is tested, and with the cut-back method, the insertion loss of 2.9±0.5 dB/cm is measured. Hits: 764 Download times: 0 View Full Text    Download reader