ZENG Kun,DUAN Xiao-feng,HUANG Yong-qing,LIU Kai,REN Xiao-min.Design and study of a long-wavelength monolithic high-contrast grating resonant-cavity-enhanced photodetector[J].Optoelectronics Letters,2019,15(4):250-254 Design and study of a long-wavelength monolithic high-contrast grating resonant-cavity-enhanced photodetector Author Name Affiliation ZENG Kun  State Key Laboratory of Information Photonics and Optical Communications, Beijing University of Posts and Tele-communications, Beijing 100876, China  DUAN Xiao-feng  State Key Laboratory of Information Photonics and Optical Communications, Beijing University of Posts and Tele-communications, Beijing 100876, China  HUANG Yong-qing  State Key Laboratory of Information Photonics and Optical Communications, Beijing University of Posts and Tele-communications, Beijing 100876, China  LIU Kai  State Key Laboratory of Information Photonics and Optical Communications, Beijing University of Posts and Tele-communications, Beijing 100876, China  REN Xiao-min  State Key Laboratory of Information Photonics and Optical Communications, Beijing University of Posts and Tele-communications, Beijing 100876, China  Abstract:       Novel construction of a resonant-cavity-enhanced photodetector (RCE-PD) with monolithic high-contrast grating (HCG) is proposed to overcome the difficulty of fabricating a high reflective mirror of RCE-PD at 1 550 nm. In this structure, HCG serves as the top mirror of the RCE-PD, whereas InGaAs serves as a sacrificial layer to achieve monolithic integration. During the bandwidth optimization, the ratio of the thickness of the total intrinsic region and the absorption layer is introduced to realize the simultaneous optimization of the thickness of spacing layers and absorption layer. After structural optimization, the quantum efficiency of the device with diameter of 20 μm is 82% at 1 550 nm, and the 3-dB bandwidth is 34 GHz at a bias of 3 V. Hits: 803 Download times: 0 View Full Text    Download reader