| ZHANG Xiaodong,ZHAO Lin,HAN Zhiguo,XU Xiaoqing,LI Suoyin,WU Aihua.A reconstruction method of AFM tip by using 2 μm lattice sample[J].Optoelectronics Letters,2022,(7):440-443 |
| A reconstruction method of AFM tip by using 2 μm lattice sample |
| Author Name | Affiliation | | ZHANG Xiaodong | Hebei Semiconductor Research Institute, Shijiazhuang 050051, China | | ZHAO Lin | Hebei Semiconductor Research Institute, Shijiazhuang 050051, China | | HAN Zhiguo | Hebei Semiconductor Research Institute, Shijiazhuang 050051, China | | XU Xiaoqing | Hebei Semiconductor Research Institute, Shijiazhuang 050051, China | | LI Suoyin | Hebei Semiconductor Research Institute, Shijiazhuang 050051, China | | WU Aihua | Hebei Semiconductor Research Institute, Shijiazhuang 050051, China |
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| Abstract: |
| As an ultra-precise instrument to characterize nano-morphology and structure, the morphology of atomic force microscopy (AFM) tip directly affects the quality of the scanned images, which in turn affects the measurement accuracy. In order to accurately characterize three-dimensional information of AFM tip, a reconstruction method of AFM tip using 2 μm lattice sample is researched. Under normal circumstances, an array of micro-nano structures is used to reconstruct the morphology of AFM tip. Therefore, the 2 μm lattice sample was developed based on semiconductor technology as a characterization tool for tip reconstruction. The experimental results show that the 2 μm lattice sample has good uniformity and consistency, and can be applied to the tip reconstruction method. In addition, the reconstruction method can accurately obtain the morphology of AFM tip, effectively eliminate the influence of the "probe effect" on the measurement results, and improve measurement accuracy. |
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