PANG Chengkai,ZHANG Qiongqiong,ZHANG Hongqiao,HUANG Haiyan,DENG Zejiang,,WU Guang.Multi-channel laser interferometer based on automatic frequency stabilization system for improving coordinate measurement accuracy[J].Optoelectronics Letters,2022,(10):588-594 |
Multi-channel laser interferometer based on automatic frequency stabilization system for improving coordinate measurement accuracy |
Author Name | Affiliation | PANG Chengkai | State Key Laboratory of Precision Spectroscopy, East China Normal University, Shanghai 200241, China Chongqing Key Laboratory of Precision Optics, Chongqing Institute of East China Normal University, Chongqing 401120, China | ZHANG Qiongqiong | State Key Laboratory of Precision Spectroscopy, East China Normal University, Shanghai 200241, China | ZHANG Hongqiao | State Key Laboratory of Precision Spectroscopy, East China Normal University, Shanghai 200241, China | HUANG Haiyan | State Key Laboratory of Precision Spectroscopy, East China Normal University, Shanghai 200241, China | DENG Zejiang | State Key Laboratory of Precision Spectroscopy, East China Normal University, Shanghai 200241, China | ,WU Guang | State Key Laboratory of Precision Spectroscopy, East China Normal University, Shanghai 200241, China Collaborative Innovation Center of Extreme Optics, Shanxi University, Taiyuan 030006, China |
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Abstract: |
A multi-channel laser interferometer (MCLI) is proposed to improve the coordinate measurement accuracy. A 780 nm external cavity laser is locked on the D2 line of 87Rb atom by polarization spectroscopy, and a high frequency stabilized laser source is obtained with a linewidth of 385.8 kHz at root mean square (RMS). The interferometers share the stabilized source and individually install on 4 axes of a coordinate measuring system. As a result, the measurement uncertainty is reduced from 1.2 ?m to 0.2 ?m within the dynamic measurement range of 1.0 m. The MCLI is adept at integrate and flexible installation, which caters to various applications on precision measurement. |
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