Ultra-precision machining is an effective approach to achieve high dimension accuracy and surface finish required in optical and laser components. An extensive study using a two-axis diamond turning machine is conducted to machine the reflector arrays used for laser diode beam shaping. To position the workpiece precisely, theoretical analysis is made so that the dimensional accuracy can be achieved. Investigations into machining burr reduction are carried out. With the process developed, reflectors with optical surface finish of 8 nm in Ra and minimized burr size of less than 0.5 μm have been achieved.