In this paper, p-chlorophenylacetic acid and p-fluorophenylacetic acid were applied to modify the indium tin oxide (ITO) electrodes. The surface work functions of unmodified ITO, p-chlorophenylacetic acid modified ITO (Cl-ITO) and p-fluorophenylacetic acid modified ITO (F-ITO) are 5.0 eV, 5.26 eV and 5.14 eV, respectively, and the water contact angles are 7.3°, 59.1° and 46.5°, respectively. The increase of the work function makes the hole injection ability of the devices improved, which is proved by the hole transport devices. The self-assembly (SAM) layers transfer hydrophilic ITO to hydrophobic ITO, which makes ITO more compatible with the hydrophobic organic layers, making the organic film more stable during the operation. After modification, the organic light emitting diodes (OLEDs), SAM-modified ITO/NPB/Alq3/LiF/Al, with better performance and stability were fabricated. Especially, the OLED with Cl-ITO (Cl-OLED) has a maximum luminance of 22 428 cd/m2 (improved by 32.9%) and a half-lifetime of 46 h. Our results suggest that employing organic acids to modify ITO surface can enhance the stability and the luminescent properties of OLED devices.