.Phosphosilicate glass film for optical waveguide by sol-gel method[J].Optoelectronics Letters,2005,1(2):121-123 Phosphosilicate glass film for optical waveguide by sol-gel method SHEN Jian LI Ai-wu ZHENG Jie ZHANG Le-tian LIU Guo-fan ZHENG Wei ZHANG Yu-shu National Integrated Optoelectronics Lab., Dept. of Electronics Eng., Jilin University, Changchun 130012, China Abstract:       In this paper, silica-on-silicon erbium-doped phosphosilicate glass film material was fabricated for optical waveguides by sol-gel method. Samples were characterized and analyzed. It is demonstrated that we have got well-distributed, good translucent, alterable thickness of film and glass state erbiumdoped phosphosilicate films material for optical waveguides by sol-gel method. Hits: 3587 Download times: 184 View Full Text    Download reader