.3-D profile measurement for complex micro-structures[J].Optoelectronics Letters,2005,1(3):205-208 |
3-D profile measurement for complex micro-structures |
HU Chun-guang HU Xiao-dong XU Lin-yan GUO Tong HU Xiao-tang |
State Key Laboratory of Precision Measuring Technology and Instruments, Tianjin University, Tianjin 300072, China |
Abstract: |
Micro-structures 3-D profile measurement is an important measurement content for research on micromachining and characterization
of micro-dimension. In this paper, a new method involved 2-D structure template, which guides phase unwrapping, is proposed
based on phase-shifting microscopic interferometry. It is fit not only for static measurement but also for dynamic measurement,
especially for motion of MEMS devices. 3-D profile of active comb of micro-resonator is obtained by using the method. The
theoretic precision in out-of-plane direction is better than 0.5 nm. The in-plane, theoretic precision in micro-structures
is better than 0.5 μm. But at the edge of micro-structures, it is on the level of micrometer mainly caused by imprecise edge
analysis. Finally, its disadvantages and the following development are discussed.
Supported: Tianjin Important Science and Technology Project (043185911) and National High-Technology Research and Development
Project (863 project) in China (2004AA404042). |
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