.Fabrication and characterization of NEMS[J].Optoelectronics Letters,2007,3(2):91-94 Fabrication and characterization of NEMS JIAO Ji-wei(State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology(SIMIT) , Chinese Academy of Sciences, Shanghai 200050, China) ; YANG Heng(State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology(SIMIT) , Chinese Academy of Sciences, Shanghai 200050, China) ; LI Tie(State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology(SIMIT) , Chinese Academy of Sciences, Shanghai 200050, China) ; LI Xin-xin(State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology(SIMIT) , Chinese Academy of Sciences, Shanghai 200050, China) ; WANG Yue-lin(State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology(SIMIT) , Chinese Academy of Sciences, Shanghai 200050, China) ; Abstract:       We proposed a called "nano-fabrication based on MEMS technology" approach to realize the typical nano-electromechanical structures,such as integrated nano probe,ultrathin cantilever,silicon nano wire,and doubly clamped nano beam,to demonstrate the feasibility and advantages. We also introduced the characterization of nano structures based on laser vibrometer and piezoresistive effect,the latter method was first time applied to investigate a doubly daped nanobeam with a thickness of about 200 nm. Hits: 3501 Download times: 203 View Full Text    Download reader