.Micro-optical structures formed by a mask moving method[J].Optoelectronics Letters,2007,3(2):95-98 Micro-optical structures formed by a mask moving method DU Chun-lei(State Key Lab of Optical Technologies for Microfabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China) ; DONG Xiao-chun(State Key Lab of Optical Technologies for Microfabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China) ; DENG Qi-ling(State Key Lab of Optical Technologies for Microfabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China) ; LUO Xian-gang(State Key Lab of Optical Technologies for Microfabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China) ; Abstract:       An unique mask moving method is developed for forming effective micro-optical structures with continuous profile. The mechanism for forming different micro-optical profiles is disclosed, and the designed approach for binary moving mask is described. Finally some concrete micro-optical components with typical microstructures are presented for demonstrating the validity of the method. Hits: 3548 Download times: 204 View Full Text    Download reader