.Optical readout uncooled infrared imaging detector using knife-edge filter operation[J].Optoelectronics Letters,2007,3(2):119-122 Optical readout uncooled infrared imaging detector using knife-edge filter operation ZHANG Q(Key Laboratory of Mechanical Behavior and Design of Materials, University of Science and Technology of China, Hefei 230027, China) ; MIAO Z(Key Laboratory of Mechanical Behavior and Design of Materials, University of Science and Technology of China, Hefei 230027, China) ; GUO Z(Key Laboratory of Mechanical Behavior and Design of Materials, University of Science and Technology of China, Hefei 230027, China) ; DONG F(Key Laboratory of Mechanical Behavior and Design of Materials, University of Science and Technology of China, Hefei 230027, China) ; XIONG Z(Key Laboratory of Mechanical Behavior and Design of Materials, University of Science and Technology of China, Hefei 230027, China) ; WU X(Key Laboratory of Mechanical Behavior and Design of Materials, University of Science and Technology of China, Hefei 230027, China) ; CHEN D(Institute of Microelectronics Chinese Academy of Science, Beijing 100029, China) ; LI C(Institute of Microelectronics Chinese Academy of Science, Beijing 100029, China) ; JIAO B(Institute of Microelectronics Chinese Academy of Science, Beijing 100029, China) ; Abstract:       An optical readout uncooled infrared (IR) imaging detector of bimaterial cantilever array using knife-edge filter operation(KEFO) is demonstrated. The angle change of each cantilever in a focal plane array (FPA) can be simultaneously detected with a resolution of 10-5 degree. A deformation magnifying substrate-free micro-cantilever unit with multi-fold interval metallized legs is specially designed and modeled. A FPA with 160× 160 pixels is fabricated and thermal images with noise equivalent temperature difference (NETD) of 400 mK are obtained by this imaging detector. Hits: 3840 Download times: 207 View Full Text    Download reader