.Digital holography and its application for microsystems inspection[J].Optoelectronics Letters,2008,4(1):72-77 Digital holography and its application for microsystems inspection Werner Jüptner BIAS D-28359 Bremen，Klagenfurter Str.2，Germany，BIAS，D-28359 Bremen，Klagenfurter Str.2，Germany，BIAS，D-28359 Bremen，Klagenfurter Str.2，Germany Abstract:       A large number of applications in the before mentioned sense is reported in the literature. In this paper a special remark will be given to the application of 3D deformation measurements using only one illumination direction for the recording of the two holograms in the reference and the loaded state, and only one observation direction for the reconstruction. Hits: 3826 Download times: 204 View Full Text    Download reader