.Novel fiber-optical interferometer with miniaturized probe for in-hole measurements[J].Optoelectronics Letters,2008,4(2):140-142 Novel fiber-optical interferometer with miniaturized probe for in-hole measurements Fraunhofer Institute for Production Technology (IPT) Steinbachstrasse 17 52074 Aachen Germany，Fraunhofer Institute for Production Technology (IPT) Steinbachstrasse 17 52074 Aachen Germany，Fraunhofer Institute for Production Technology (IPT) Steinbachstrasse 17 52074 Aachen Germany，Fraunhofer Institute for Production Technology (IPT) Steinbachstrasse 17 52074 Aachen Germany Abstract:       Today,micro-system technology and the development of new MEMS(Micro-Eleetro-Mechanical Systems)ate emerging rapidly.In order for this development to become a SUCCESS in the long run,measurement systems have to ensure product quality.Most often,MEMS have to be tested by means of functionality or destructive tests.One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities.We present a measurement system that could be used for these kinds of measurements.The system combines a fiber optical,miniaturized sensing probe with low-coherence intcrferometry,so that absolute distance measurements with nanometcr accuracy are possible. Hits: 3396 Download times: 256 View Full Text    Download reader