FANG Chu,GUO Jin,YANG Guo-qing,JIANG Zhen-hua,XU Xin-hang,WANG Ting-feng.Design and performance test of a two-axis fast steering mirror driven by piezoelectric actuators[J].Optoelectronics Letters,2016,12(5):333-336
Design and performance test of a two-axis fast steering mirror driven by piezoelectric actuators
Author NameAffiliation
FANG Chu State Key Laboratory of Laser Interaction with Matter, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Science, Changchun 130033, China
University of Chinese Academy of Science, Beijing 100049, China 
GUO Jin State Key Laboratory of Laser Interaction with Matter, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Science, Changchun 130033, China 
YANG Guo-qing State Key Laboratory of Laser Interaction with Matter, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Science, Changchun 130033, China
University of Chinese Academy of Science, Beijing 100049, China 
JIANG Zhen-hua State Key Laboratory of Laser Interaction with Matter, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Science, Changchun 130033, China 
XU Xin-hang State Key Laboratory of Laser Interaction with Matter, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Science, Changchun 130033, China 
WANG Ting-feng State Key Laboratory of Laser Interaction with Matter, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Science, Changchun 130033, China 
Abstract:
      A novel design of a two-axis fast steering mirror (FSM) with piezoelectric actuators is proposed for incoherent laser beam combination. The mechanical performance of the FSM is tested. The results show that the tilting range of the mirror is about 4 mrad, and the 1st-order resonance frequency is about 250 Hz. A self-designed grating encoder is taken as the sensor, which ensures the optimal precision of 10 μrad. The novel mechanical design can meet the requirement of engineering in incoherent laser beam combination.
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