BAO Sen,LI Hong-jing,ZHENG Gai-ge.Concentration sensor with multilayer thin film-coupled surface plasmon resonance[J].Optoelectronics Letters,2021,17(5):289-293 Concentration sensor with multilayer thin film-coupled surface plasmon resonance Author Name Affiliation BAO Sen  Department of Electronics Engineering, Nanjing Xiaozhuang University, Nanjing 211171, China  LI Hong-jing  Department of Electronics Engineering, Nanjing Xiaozhuang University, Nanjing 211171, China  ZHENG Gai-ge  Jiangsu Collaborative Innovation Center on Atmospheric Environment and Equipment Technology CICAEET, Nan-jing University of Information Science &Technology, Nanjing 210044, China  Abstract:       A concentration sensor based on silver (Ag)/silica (SiO2)/zirconium anhydride (ZrO2) multilayer structure is proposed. Two dominant dips can be observed in the reflection spectrum, which correspond to different sensing methods. Firstly, it is demonstrated that the coupling between the surface plasmon polariton (SPP) mode and a planar waveguide mode (WGM) leads to the Fano resonance (FR). The induced bonding hybridized modes have ultra-narrow full wave at half maximum (FWHM) as well as ultra-high quality factors (Q). We can achieve a theoretical value of the refractive index sensitivity 167 times higher than conventional surface plasmon resonance (SPR) sensors with a single metal layer. Secondly, the waveguide coupling mode was examined by measuring angular spectra. A deep and sharp waveguide coupling dip was obtained. The experimental results show that with an increase in the concentration of the fill dielectric material in the surface of the system, the resonance dip exhibits a remarkable red shift, and the measured angular sensitivity is 98.04°/RIU. Hits: 814 Download times: 0 View Full Text    Download reader