LU Lidan,WANG Shuai,ZENG Zhoumo,DONG Mingli,ZHU Lianqing.Single silicon waveguide MRR based Fano resonance in the whole spectral bands[J].Optoelectronics Letters,2022,(7):398-403 Single silicon waveguide MRR based Fano resonance in the whole spectral bands Author Name Affiliation LU Lidan  School of Instrument Science and Opto Electronics Engineering, Beijing Information Science and Technology University, Beijing 100016, China  WANG Shuai  School of Instrument Science and Opto Electronics Engineering, Beijing Information Science and Technology University, Beijing 100016, China  ZENG Zhoumo  Department of Precision Instrument Engineering, Tianjin University, Tianjin 300072, China  DONG Mingli  School of Instrument Science and Opto Electronics Engineering, Beijing Information Science and Technology University, Beijing 100016, China  ZHU Lianqing  School of Instrument Science and Opto Electronics Engineering, Beijing Information Science and Technology University, Beijing 100016, China  Abstract:       To improve the integration of Fano devices, we design a T-shaped waveguide coupling micro-ring resonator (MRR) structure to achieve a single cavity with Fano resonance in the whole spectral bands. The mathematical relationship between the phase factor, the coupling coefficient of the bus waveguide, and the Fano resonance slope extinction ratio (ER) is established. The electron beam exposure process is used to obtain a device with an insertion loss of ~3 dB. The maximum ER of the Fano lineshape exceeds 15 dB, and the slope ratio (SR) is 251.3 dB/nm. This design improves the compactness of the Fano resonant device. Hits: 269 Download times: 0 View Full Text    Download reader