WANG Shuai,LU Wenda,LAI Xiaohan,WANG Hong,ZHU Lianqing,LU Lidan.Silicon waveguide-based single cavity Fano resonance temperature sensor[J].Optoelectronics Letters,2023,(3):139-143
Silicon waveguide-based single cavity Fano resonance temperature sensor
Author NameAffiliation
WANG Shuai Key Laboratory of the Ministry of Education for Optoelectronic Measurement Technology and Instrument, Beijing Information Science and Technology University, Beijing 100059, China 
LU Wenda Key Laboratory of the Ministry of Education for Optoelectronic Measurement Technology and Instrument, Beijing Information Science and Technology University, Beijing 100059, China 
LAI Xiaohan Key Laboratory of the Ministry of Education for Optoelectronic Measurement Technology and Instrument, Beijing Information Science and Technology University, Beijing 100059, China 
WANG Hong Key Laboratory of the Ministry of Education for Optoelectronic Measurement Technology and Instrument, Beijing Information Science and Technology University, Beijing 100059, China 
ZHU Lianqing Key Laboratory of the Ministry of Education for Optoelectronic Measurement Technology and Instrument, Beijing Information Science and Technology University, Beijing 100059, China 
LU Lidan Key Laboratory of the Ministry of Education for Optoelectronic Measurement Technology and Instrument, Beijing Information Science and Technology University, Beijing 100059, China 
Abstract:
      A compact Fano resonant temperature sensor composed of a micro-ring resonator (MRR) coupled double-T-shaped waveguide is developed. The coupling gap and coefficient of the device are optimized by the finite difference time domain (FDTD) method. The maximum slope ratio (SR) of the MRR-coupled single-T-shaped waveguide is ?2.13 dB/nm. The SR of the double-T-shaped waveguide is ?49.69 dB/nm which is 23 times that of the single-T-shaped waveguide. The simulation results show that the temperature sensitivity of optical intensity decreases with increasing temperature in the range from 303.6 K to 343.8 K. The wavelength-temperature sensitivity of the double-T-shaped waveguide microring is 76.5 pm/K. After introducing the double-T-shaped waveguide structure, the device's performance is greatly improved, and the double-T-shaped waveguide has a good application prospect as a temperature sensor.
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