| ZHANG Zeyu,QIAN Jin,QIAN Lirong,WEN Fujun,WANG Litian,LI Cuiping.Finite element simulation of Rayleigh surface acoustic wave in (100) AlN/(100) ZnO/diamond layered structure[J].Optoelectronics Letters,2023,(12):732-738 |
| Finite element simulation of Rayleigh surface acoustic wave in (100) AlN/(100) ZnO/diamond layered structure |
| Author Name | Affiliation | | ZHANG Zeyu | Tianjin Key Laboratory of Film Electronic and Communication Devices, School of Integrated Circuit Science and Engineering, Tianjin University of Technology, Tianjin 300384, China
Engineering Research Center of Optoelectronic Devices & Communication Technology, School of Integrated Circuit Science and Engineering, Tianjin University of Technology, Tianjin 300384, China | | QIAN Jin | Tianjin Key Laboratory of Film Electronic and Communication Devices, School of Integrated Circuit Science and Engineering, Tianjin University of Technology, Tianjin 300384, China
Engineering Research Center of Optoelectronic Devices & Communication Technology, School of Integrated Circuit Science and Engineering, Tianjin University of Technology, Tianjin 300384, China | | QIAN Lirong | Tianjin Key Laboratory of Film Electronic and Communication Devices, School of Integrated Circuit Science and Engineering, Tianjin University of Technology, Tianjin 300384, China
Engineering Research Center of Optoelectronic Devices & Communication Technology, School of Integrated Circuit Science and Engineering, Tianjin University of Technology, Tianjin 300384, China | | WEN Fujun | Tianjin Key Laboratory of Film Electronic and Communication Devices, School of Integrated Circuit Science and Engineering, Tianjin University of Technology, Tianjin 300384, China
Engineering Research Center of Optoelectronic Devices & Communication Technology, School of Integrated Circuit Science and Engineering, Tianjin University of Technology, Tianjin 300384, China | | WANG Litian | Tianjin Key Laboratory of Film Electronic and Communication Devices, School of Integrated Circuit Science and Engineering, Tianjin University of Technology, Tianjin 300384, China
Engineering Research Center of Optoelectronic Devices & Communication Technology, School of Integrated Circuit Science and Engineering, Tianjin University of Technology, Tianjin 300384, China | | LI Cuiping | Tianjin Key Laboratory of Film Electronic and Communication Devices, School of Integrated Circuit Science and Engineering, Tianjin University of Technology, Tianjin 300384, China
Engineering Research Center of Optoelectronic Devices & Communication Technology, School of Integrated Circuit Science and Engineering, Tianjin University of Technology, Tianjin 300384, China |
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| Abstract: |
| With the rapid development of the fifth-generation (5G) wireless system, the explosive growth of transmitted data raises higher requirements for high-performance surface acoustic wave (SAW) devices as filters and duplexers. (100) AlN/(100) ZnO/diamond layered structures are theoretically simulated by finite element method (FEM) to investigate the Rayleigh SAW propagation properties, including phase velocity, electromechanical coupling coefficient K2, and temperature coefficient of frequency (TCF). Three types of layered structures with different interdigital transducers (IDTs) arrangements, which are IDTs/(100) AlN/(100) ZnO/diamond, (100) AlN/IDTs/(100) ZnO/diamond, and (100) AlN/(100) ZnO/IDTs/diamond structures, are considered in the simulations. The results show that the Sezawa mode exhibits larger K2 than the other modes. We found that the (100) AlN/IDTs/(100) ZnO/diamond structure exhibited better SAW properties, including high K2 and appropriate phase velocity. |
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